氧化鋁 | 藍寶石 | 氧化釔 | 氧化鋯 | 石英玻璃 | 氮化鋁 | 氮化硼 | 氮化硅 | 炭化硅 | 硅 | ||
Alumina | Alumina | Yttrium Oxide | Zirconia | Quartz | Aluminum Nitride | Boron Nitride | Silicon Nitride | Silicon Carbide | Silicon | ||
(Al2O3) | (Al2O3) | (Y2O3) | (ZrO2) | (SiO2) | (ALN) | (BN) | (Si3N4) | (SiC) | (Si) | ||
機械特性 | 純度 Purity% |
99.8 | 99.97 | 99.9 | 99.9 | 99.99 | 99.9 | 99 | 99.99 | 100 | |
堆積密度 Bulk Density |
3.9以上 | 3.99 | 4.9-50 | 5.5-6.0 | 2.15-2.21 | 3.30-3.32 | 1.91 | 3.25 | 3.02 | 2.33 | |
維氏硬度 Vickers Hardness HV1=9.807N |
17.2-17.5 | 17.7 | 6 | 12.5-13 | 8.6 | 11.2 | 14 | 21-22 | 10.2 | ||
彎曲強度[Mpa] | 345-370 | 300 | 100-130 | 890-930 | 70 | 310 | 18-22 | 880 | 250 | 300 | |
壓縮強度[Mpa] Compressive Strength |
2350-2400 | 5100-5400 | >1100 | 3000 | 18-25 | 3820 | 2700 | 481-549 | |||
Young率[Gpa] Youngs Modulus |
370 | 390 | 160-170 | 200-210 | 72 | 310-320 | 300 | 270 | 190 | ||
Poissons比 Poissons Ratio |
0.23 | 0.31 | 0.3 | 0.17 | 0.24 | 0.28 | 0.24 | 0.27 | |||
熱特性 | 熱傳導率 Thermal Conductivity |
30 | 33.5 | 14 | 2.9-3.1 | 1.5 | 160-170 | 130 | 30 | 175 | 157 |
熱膨脹系數 Thermal Expansion
|
7.8 | 8 | 7-9 | 9-11 | 0.5 | 4.2 | 0.3-1 | 2.6-2.8 | 4.3 | 3.9 | |
耐熱沖擊強度 Heat Shock Strength
|
350 | 200 | 350 | >1000 | 400 | 750 | 400 | ||||
比熱[RT](J/kg. K) Specific Heat
|
0.78*10 | 0.45*10 | 0.48*10 | 0.72*10 | 0.35*10 | 0.66*10 | 0.68 | 0.7*10 | |||
最高使用溫度[℃] Max Useable Temperature |
1400~1800 | 1800 | 1400 | 1400 | 1200 | 800-1000,1900氧化 | 800,1800氧化 | 1200 | 1300 | 1300 | |
體積電阻[Ω. cm] Volume Resistivity |
>10 | >10 | >10 | >10 | >10 | >10 | >10 | >10 | >10 | 2.3*10 | |
絕緣破壞強度 Dielectric Strength |
15*10 | 15*10 | 11*10 | 13*10 | 14-16*10 | 20*10 | 10*10 | 35*10 | 30*10 | ||
誘電率[25 oC 1MHz] Dielectric Constant |
10 | 10 | 11 | 30-33 | 3.75 | 9 | 4 | 9.6 | 2.7 |
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